Of vacuum pumps
Air or vacuum pumps, air or other gas compressors and fans; ventilating or recycling hoods incorporating a fan, whether or not fitted with filters; gas-tight biological safety cabinets, whether or not fitted with filters; parts thereof: > Parts: > Other > Of vacuum pumps
Duty Rate (from China)
Except for products described in headings 9903.03.02–9903.03.11, articles the product of any country, as provided for in subdivision (aa) of U.S. note 2 to this subchapter
Except as provided in headings 9903.88.05, 9903.88.06, 9903.88.07, 9903.88.08, 9903.88.10, 9903.88.11, 9903.88.14, 9903.88.19, 9903.88.50, 9903.88.52, 9903.88.58, 9903.88.60, 9903.88.62, 9903.88.66, 9903.88.67, 9903.88.68, or 9903.88.69, articles the product of China, as provided for in U.S. note 20(a) to this subchapter and as provided for in the subheadings enumerated in U.S. note 20(b) [to this subchapter]
Products classified under HTS 8414.90.91.40
Vacuum Pump Shaft Seal Kit
Mechanical shaft seal kits preventing leaks in pumps for crystal growers. HTS 8414.90.91.40 for semiconductor boule vacuum pumps. Ferritic materials.
Pump Inlet Screen/Filter
Stainless screens protecting pump in wafer fab lines. HTS 8414.90.91.40.
Vacuum Pump Mounting Bracket
Custom brackets for pump alignment in slicers. HTS 8414.90.91.40.
Vacuum Pump Baseplate
Machined aluminum baseplates mounting vacuum pumps in semiconductor grinder stations. HTS 8414.90.91.40 as structural parts of vacuum pumps for crystal boule grinding to wafer diameters. Vibration-damped design.
Vacuum Pump Heater Cartridge
Cartridge heaters for outgassing vacuum pump surfaces in semiconductor float zone crystal pullers. HTS 8414.90.91.40 for parts of vacuum pumps in monocrystalline semiconductor boule production. Elevates temps to 150°C for bakeout.
Gate Valve Actuator for Vacuum Pumps
Pneumatic actuators operating gate valves on vacuum pump ports in wafer slicing saw exhaust. Classified HTS 8414.90.91.40 as vacuum pump parts for semiconductor wafer production from boules. Provides precise isolation.
Pump Exhaust Silencer
Silencer baffles reducing noise from roughing pumps in wafer polishing cleanrooms. Under HTS 8414.90.91.40 as parts of vacuum pumps processing semiconductor wafers. Clean exhaust design.
Turbo Molecular Vacuum Pump Rotor Assembly
This rotor assembly is a critical rotating component in turbo molecular vacuum pumps used for creating high vacuum levels in semiconductor wafer processing equipment. It falls under HTS 8414.90.91.40 as a part specifically designed for vacuum pumps employed in the growth and processing of semiconductor materials like silicon wafers. The high-speed rotor generates momentum transfer to evacuate gases efficiently.
Cryogenic Vacuum Pump Stator Housing
The stator housing encases the cold head in cryogenic vacuum pumps for ultra-high vacuum in semiconductor thin-film deposition processes. Classified under HTS 8414.90.91.40 as a part of vacuum pumps integral to processing semiconductor wafers. It maintains structural integrity under extreme low temperatures during gas cryopumping.
Dry Vacuum Pump Scroll Plate
Precision-machined scroll plates in oil-free dry vacuum pumps used for clean pumping in semiconductor wafer lapping and polishing lines. HTS 8414.90.91.40 applies as parts of vacuum pumps for semiconductor material processing equipment. They enable contactless compression for contamination-free operation.
Vacuum Pump Foreline Trap Assembly
Foreline trap assemblies capture contaminants in the rough vacuum line of turbopumps for semiconductor crystal growth systems. Under HTS 8414.90.91.40 as vacuum pump parts for processing silicon boules into wafers. Prevents oil backstreaming into high-vacuum chambers.
High Vacuum Pump Bellows Valve
Bellows-sealed isolation valves control gas flow in vacuum pump inlet manifolds for semiconductor wafer grinders. HTS 8414.90.91.40 covers it as a part of vacuum pumps in wafer preparation equipment. Ensures all-metal, bakeable seals for UHV conditions.
Roughing Vacuum Pump Diaphragm Kit
Replacement diaphragm kits for roughing pumps backing high-vacuum systems in semiconductor slicing saws. Falls under HTS 8414.90.91.40 as parts of vacuum pumps for wafer slicing from monocrystalline boules. Provides oil-free rough vacuum to 10^-2 Torr.
Vacuum Pump Controller PCB
Printed circuit boards regulating pump speed and pressure in semiconductor processing vacuum stations. HTS 8414.90.91.40 as electronic parts of vacuum pumps for crystal boule grinding. Interfaces with fab automation systems.
Ion Pump Magnet Assembly
Permanent magnet arrays for sputter ion pumps in ultra-clean vacuum for semiconductor wafer polishers. Under HTS 8414.90.91.40 as parts of vacuum pumps processing semiconductor wafers to flatness tolerances. Provides ionizing magnetic field without hydrocarbons.