Roughing Vacuum Pump Diaphragm Kit
Replacement diaphragm kits for roughing pumps backing high-vacuum systems in semiconductor slicing saws. Falls under HTS 8414.90.91.40 as parts of vacuum pumps for wafer slicing from monocrystalline boules. Provides oil-free rough vacuum to 10^-2 Torr.
Import Duty Rates by Country of Origin
Alternative Classifications
This product could be classified differently depending on its characteristics or intended use.
If for lapping/polishing vacuum hold-down
Wafer grinder/polisher pumps have separate stats breaks.
If imported as bulk rubber diaphragms
Unmachined rubber plates classify under Chapter 40, not pump parts.
If for air-driven roughing pumps
Air compressors/pumps have different subheadings.
Not sure which classification is right?
The Tariff Assistant works through the GRI rules on your specific product to reach the right HTS code — and can price the duty on it in the same conversation.
Import Tips & Compliance
• Include wear-part certification and OEM interchangeability docs
• Value as kit vs individual diaphragms affects duty computation
Related Products under HTS 8414.90.91.40
Vacuum Pump Shaft Seal Kit
Mechanical shaft seal kits preventing leaks in pumps for crystal growers. HTS 8414.90.91.40 for semiconductor boule vacuum pumps. Ferritic materials.
Pump Inlet Screen/Filter
Stainless screens protecting pump in wafer fab lines. HTS 8414.90.91.40.
Vacuum Pump Mounting Bracket
Custom brackets for pump alignment in slicers. HTS 8414.90.91.40.
Vacuum Pump Baseplate
Machined aluminum baseplates mounting vacuum pumps in semiconductor grinder stations. HTS 8414.90.91.40 as structural parts of vacuum pumps for crystal boule grinding to wafer diameters. Vibration-damped design.
Vacuum Pump Heater Cartridge
Cartridge heaters for outgassing vacuum pump surfaces in semiconductor float zone crystal pullers. HTS 8414.90.91.40 for parts of vacuum pumps in monocrystalline semiconductor boule production. Elevates temps to 150°C for bakeout.
Gate Valve Actuator for Vacuum Pumps
Pneumatic actuators operating gate valves on vacuum pump ports in wafer slicing saw exhaust. Classified HTS 8414.90.91.40 as vacuum pump parts for semiconductor wafer production from boules. Provides precise isolation.