Roughing Vacuum Pump Diaphragm Kit
Replacement diaphragm kits for roughing pumps backing high-vacuum systems in semiconductor slicing saws. Falls under HTS 8414.90.91.40 as parts of vacuum pumps for wafer slicing from monocrystalline boules. Provides oil-free rough vacuum to 10^-2 Torr.
Import Duty Rates by Country of Origin
Alternative Classifications
This product could be classified differently depending on its characteristics or intended use.
If for lapping/polishing vacuum hold-down
Wafer grinder/polisher pumps have separate stats breaks.
If imported as bulk rubber diaphragms
Unmachined rubber plates classify under Chapter 40, not pump parts.
If for air-driven roughing pumps
Air compressors/pumps have different subheadings.
Not sure which classification is right?
Our AI classifier can analyze your specific product and recommend the correct HTS code with confidence.
Import Tips & Compliance
• Include wear-part certification and OEM interchangeability docs
• Value as kit vs individual diaphragms affects duty computation
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