Other
Air or vacuum pumps, air or other gas compressors and fans; ventilating or recycling hoods incorporating a fan, whether or not fitted with filters; gas-tight biological safety cabinets, whether or not fitted with filters; parts thereof: > Parts: > Other
Duty Rate (from China)
Except for products described in headings 9903.03.02–9903.03.11, articles the product of any country, as provided for in subdivision (aa) of U.S. note 2 to this subchapter
Except as provided in headings 9903.88.05, 9903.88.06, 9903.88.07, 9903.88.08, 9903.88.10, 9903.88.11, 9903.88.14, 9903.88.19, 9903.88.50, 9903.88.52, 9903.88.58, 9903.88.60, 9903.88.62, 9903.88.66, 9903.88.67, 9903.88.68, or 9903.88.69, articles the product of China, as provided for in U.S. note 20(a) to this subchapter and as provided for in the subheadings enumerated in U.S. note 20(b) [to this subchapter]
Products classified under HTS 8414.90.91
Plasma Etch Vacuum Pump for Wafer Processing
High-vacuum pump part for plasma etching equipment in semiconductor wafer fabrication, supporting the processing of semiconductor materials into devices. Essential for maintaining process vacuum during reactive ion etching of wafer patterns. HTS 8414.90.91 covers such parts used in semiconductor device processing.
Silicon Crystal Ingot Vacuum Pump
Pump part for equipment processing silicon crystal ingots into semiconductor wafers, specifically for vacuum during boule handling. Supports the growth and initial processing sequence described in statistical note (a). HTS 8414.90.91 for such semiconductor-specific vacuum pump parts.
Czochralski Crystal Puller Vacuum Pump
This vacuum pump is a critical part of Czochralski crystal growers used to produce monocrystalline silicon boules for semiconductor wafers. It maintains the ultra-high vacuum environment necessary during the crystal pulling process to ensure purity and quality. Classified under HTS 8414.90.91 as a part of vacuum pumps specialized for semiconductor manufacturing equipment.
Float Zone Crystal Grower Vacuum Chamber Pump
Specialized vacuum pump component for float zone crystal growers that produce high-purity silicon crystals by float zone methods for wafer production. It handles the vacuum requirements for zone refining processes in semiconductor manufacturing. Falls under HTS 8414.90.91 as parts of vacuum pumps for semiconductor crystal growth equipment.
Semiconductor Wafer Slicing Saw Vacuum Pump
Vacuum pump part for wafer slicing saws that cut monocrystalline boules into semiconductor wafers, as described in statistical note (a)(ii)(B). It provides coolant mist evacuation and chip removal under vacuum during precision diamond saw operations. HTS 8414.90.91 covers such specialized pump parts for semiconductor wafer preparation.
Crystal Boule Grinder Vacuum Extraction Pump
This pump is a part of crystal grinders that shape semiconductor boules to precise diameters and grind orientation flats, per statistical note (a)(ii)(A). It extracts grinding dust and maintains cleanroom vacuum conditions during boule preparation for wafer slicing. Classified as other vacuum pump parts under HTS 8414.90.91 for semiconductor equipment.
Wafer Lapping Machine Vacuum Hold-Down Pump
Vacuum pump component for wafer lappers that flatten semiconductor wafers to precise tolerances during preparation, statistical note (a)(ii)(C). Provides hold-down vacuum to secure wafers during double-sided lapping operations. HTS 8414.90.91 for parts of such semiconductor wafer processing vacuum systems.
Semiconductor Wafer Polisher Vacuum Pump
Specialized pump for wafer polishers that achieve mirror-finish flatness on semiconductor wafers prior to fabrication, statistical note (a)(ii)(C). Manages chemical mechanical polishing (CMP) slurry evacuation and backside vacuum chucking. Parts thereof under HTS 8414.90.91 for semiconductor wafer prep equipment.
Wafer Prober Vacuum Pump Assembly
Vacuum pump component for wafer probers that test semiconductor devices electrically after processing. Provides vacuum for probe card alignment and wafer manipulation during testing operations. Although testing equipment primarily in Chapter 90, certain vacuum handling parts remain in 8414.90.91 per semiconductor notes.
Gallium Arsenide Wafer Prep Vacuum Pump
Specialized vacuum pump for preparation equipment handling gallium arsenide semiconductor wafers, explicitly mentioned in statistical notes. Used in grinding, slicing, and polishing of GaAs boules for compound semiconductor devices. Classified under HTS 8414.90.91 as parts for semiconductor wafer manufacturing equipment.