Other
Air or vacuum pumps, air or other gas compressors and fans; ventilating or recycling hoods incorporating a fan, whether or not fitted with filters; gas-tight biological safety cabinets, whether or not fitted with filters; parts thereof: > Parts: > Other > Other
Duty Rate (from China)
Except for products described in headings 9903.03.02–9903.03.11, articles the product of any country, as provided for in subdivision (aa) of U.S. note 2 to this subchapter
Except as provided in headings 9903.88.05, 9903.88.06, 9903.88.07, 9903.88.08, 9903.88.10, 9903.88.11, 9903.88.14, 9903.88.19, 9903.88.50, 9903.88.52, 9903.88.58, 9903.88.60, 9903.88.62, 9903.88.66, 9903.88.67, 9903.88.68, or 9903.88.69, articles the product of China, as provided for in U.S. note 20(a) to this subchapter and as provided for in the subheadings enumerated in U.S. note 20(b) [to this subchapter]
Products classified under HTS 8414.90.91.80
Czochralski Crystal Puller Vacuum Pump
This vacuum pump is a critical replacement part for Czochralski crystal growers used in semiconductor boule production from silicon melts. It maintains the vacuum environment necessary for growing high-purity monocrystalline ingots under HTS 8414.90.91.80 as a part of semiconductor wafer manufacturing equipment. The statistical note explicitly covers such pumps in crystal growing apparatus.
Float Zone Crystal Grower Vacuum Chamber Pump
Specialized vacuum pump component for float zone crystal pullers that produce ultra-pure silicon rods for wafer slicing in semiconductor fabs. Classified under HTS 8414.90.91.80 per statistical note for wafer manufacturing equipment parts. Enables the high-vacuum conditions required for zone refining process.
Wafer Slicing Saw Vacuum Extraction Pump
Vacuum pump part for wafer slicing saws that remove slurry and debris during diamond saw cutting of semiconductor boules into wafers. Falls under HTS 8414.90.91.80 as part of wafer preparation equipment noted in statistical definitions. Ensures clean slicing environment for precise wafer thickness control.
Crystal Boule Grinder Vacuum Hold-Down Pump
Vacuum pump used in crystal grinders to secure semiconductor boules during diameter and flat grinding for wafer production. HTS 8414.90.91.80 classification per statistical note (a)(ii)(A) for wafer preparation equipment parts. Provides precise wafer flat orientation indicators via ground flats.
Wafer Lapping Machine Vacuum Chucking Pump
High-precision vacuum pump part for wafer lappers that hold wafers during flatness correction in semiconductor preparation. Covered by HTS 8414.90.91.80 statistical note for wafer grinders, lappers and polishers. Critical for achieving surface flatness tolerances before fab processing.
Semiconductor Wafer Polisher Vacuum Pump
Vacuum pump component for chemical-mechanical wafer polishers preparing wafer surfaces for device fabrication. HTS 8414.90.91.80 per statistical note covering wafer polishers in preparation equipment. Achieves mirror finish critical for lithography processes.
Silicon Ingot Vacuum Annealing Pump
Vacuum pump for semiconductor ingot annealing furnaces that relieve stresses post-crystal growth. Classifiable under HTS 8414.90.91.80 as part of wafer manufacturing equipment supporting crystal processing. Ensures defect-free wafers through controlled thermal processing.
Gallium Arsenide Wafer Prep Vacuum Pump
Specialized vacuum pump for GaAs compound semiconductor wafer grinding/lapping equipment noted in statistical definitions. HTS 8414.90.91.80 covers processing of gallium arsenide materials into wafers. Handles corrosive etching byproducts unique to III-V semiconductors.
Wafer Crystal Grinder Coolant Vacuum Pump
Vacuum pump extracting coolant slurry from crystal grinders shaping semiconductor boules for wafer production. HTS 8414.90.91.80 per statistical note for wafer preparation grinders. Maintains grinding wheel precision during diameter reduction.
Monocrystalline Boule Vacuum Inspection Pump
Vacuum pump for boule inspection stations verifying crystal quality before wafer slicing in semiconductor lines. Falls under HTS 8414.90.91.80 as supporting equipment for statistical note wafer manufacturing. Provides defect-free environment for resistivity/resistivity flat verification.