Semiconductor Wafer Polisher Vacuum Pump
Vacuum pump component for chemical-mechanical wafer polishers preparing wafer surfaces for device fabrication. HTS 8414.90.91.80 per statistical note covering wafer polishers in preparation equipment. Achieves mirror finish critical for lithography processes.
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Alternative Classifications
This product could be classified differently depending on its characteristics or intended use.
If primary function is CMP slurry circulation
Centrifugal slurry pumps classified separately from vacuum functions
If integrated in wafer flatness measuring systems
Measuring/testing apparatus parts in Chapter 90 per statistical note
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Import Tips & Compliance
• CMP slurry compatibility certification with polisher specs
• Provide incoming wafer thickness vs. post-polish tolerance data
• Avoid generic CMP vac classification under 8414.90.50
Related Products under HTS 8414.90.91.80
Czochralski Crystal Puller Vacuum Pump
This vacuum pump is a critical replacement part for Czochralski crystal growers used in semiconductor boule production from silicon melts. It maintains the vacuum environment necessary for growing high-purity monocrystalline ingots under HTS 8414.90.91.80 as a part of semiconductor wafer manufacturing equipment. The statistical note explicitly covers such pumps in crystal growing apparatus.
Float Zone Crystal Grower Vacuum Chamber Pump
Specialized vacuum pump component for float zone crystal pullers that produce ultra-pure silicon rods for wafer slicing in semiconductor fabs. Classified under HTS 8414.90.91.80 per statistical note for wafer manufacturing equipment parts. Enables the high-vacuum conditions required for zone refining process.
Wafer Slicing Saw Vacuum Extraction Pump
Vacuum pump part for wafer slicing saws that remove slurry and debris during diamond saw cutting of semiconductor boules into wafers. Falls under HTS 8414.90.91.80 as part of wafer preparation equipment noted in statistical definitions. Ensures clean slicing environment for precise wafer thickness control.
Crystal Boule Grinder Vacuum Hold-Down Pump
Vacuum pump used in crystal grinders to secure semiconductor boules during diameter and flat grinding for wafer production. HTS 8414.90.91.80 classification per statistical note (a)(ii)(A) for wafer preparation equipment parts. Provides precise wafer flat orientation indicators via ground flats.
Wafer Lapping Machine Vacuum Chucking Pump
High-precision vacuum pump part for wafer lappers that hold wafers during flatness correction in semiconductor preparation. Covered by HTS 8414.90.91.80 statistical note for wafer grinders, lappers and polishers. Critical for achieving surface flatness tolerances before fab processing.
Silicon Ingot Vacuum Annealing Pump
Vacuum pump for semiconductor ingot annealing furnaces that relieve stresses post-crystal growth. Classifiable under HTS 8414.90.91.80 as part of wafer manufacturing equipment supporting crystal processing. Ensures defect-free wafers through controlled thermal processing.