Vacuum Pump Heater Cartridge
Cartridge heaters for outgassing vacuum pump surfaces in semiconductor float zone crystal pullers. HTS 8414.90.91.40 for parts of vacuum pumps in monocrystalline semiconductor boule production. Elevates temps to 150°C for bakeout.
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Alternative Classifications
This product could be classified differently depending on its characteristics or intended use.
If non-specific electric heaters
Generic heating resistors classify under Chapter 85.
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Import Tips & Compliance
• Wattage and thermocouple integration specs required
• UL/CSA certs for electrical safety in fabs
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