Cryogenic Vacuum Pump Stator Housing
The stator housing encases the cold head in cryogenic vacuum pumps for ultra-high vacuum in semiconductor thin-film deposition processes. Classified under HTS 8414.90.91.40 as a part of vacuum pumps integral to processing semiconductor wafers. It maintains structural integrity under extreme low temperatures during gas cryopumping.
Import Duty Rates by Country of Origin
Alternative Classifications
This product could be classified differently depending on its characteristics or intended use.
If for use in wafer preparation crystal grinders
Dedicated parts for crystal grinders/pullers in boule-to-wafer processing have a specific statistical provision.
If imported as bulk stainless steel reservoir without pump-specific machining
Unfinished metal reservoirs shift to Chapter 73 for iron/steel reservoirs, not pump parts.
If sold as part of a complete semiconductor processing machine set
If bundled in a machine set for semiconductor fab, it may classify as a complete machine part under 8479.
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Import Tips & Compliance
• Provide material composition certificates (e.g
• stainless steel grades) to prove suitability for cryogenic vacuum service
• Label shipments with 'For Semiconductor Processing Vacuum Pumps Only' to support classification and avoid general parts duties
Related Products under HTS 8414.90.91.40
Vacuum Pump Shaft Seal Kit
Mechanical shaft seal kits preventing leaks in pumps for crystal growers. HTS 8414.90.91.40 for semiconductor boule vacuum pumps. Ferritic materials.
Pump Inlet Screen/Filter
Stainless screens protecting pump in wafer fab lines. HTS 8414.90.91.40.
Vacuum Pump Mounting Bracket
Custom brackets for pump alignment in slicers. HTS 8414.90.91.40.
Vacuum Pump Baseplate
Machined aluminum baseplates mounting vacuum pumps in semiconductor grinder stations. HTS 8414.90.91.40 as structural parts of vacuum pumps for crystal boule grinding to wafer diameters. Vibration-damped design.
Vacuum Pump Heater Cartridge
Cartridge heaters for outgassing vacuum pump surfaces in semiconductor float zone crystal pullers. HTS 8414.90.91.40 for parts of vacuum pumps in monocrystalline semiconductor boule production. Elevates temps to 150°C for bakeout.
Gate Valve Actuator for Vacuum Pumps
Pneumatic actuators operating gate valves on vacuum pump ports in wafer slicing saw exhaust. Classified HTS 8414.90.91.40 as vacuum pump parts for semiconductor wafer production from boules. Provides precise isolation.