High Vacuum Pump Bellows Valve
Bellows-sealed isolation valves control gas flow in vacuum pump inlet manifolds for semiconductor wafer grinders. HTS 8414.90.91.40 covers it as a part of vacuum pumps in wafer preparation equipment. Ensures all-metal, bakeable seals for UHV conditions.
Import Duty Rates by Country of Origin
Alternative Classifications
This product could be classified differently depending on its characteristics or intended use.
If imported separately for general vacuum service
Non-pump-specific valves go to valves and similar articles.
If dedicated to boule grinder vacuum extraction
Wafer prep grinders/lappers have precise statistical categories.
If as component in complete wafer polishing machine
Parts of unfinished semiconductor machines classify under 8479.
Not sure which classification is right?
The Tariff Assistant works through the GRI rules on your specific product to reach the right HTS code — and can price the duty on it in the same conversation.
Import Tips & Compliance
• Specify bakeout temperature ratings (>200°C) to prove semiconductor fab suitability
• Pair with pump model affidavits for binding ruling requests if uncertain
Related Products under HTS 8414.90.91.40
Vacuum Pump Shaft Seal Kit
Mechanical shaft seal kits preventing leaks in pumps for crystal growers. HTS 8414.90.91.40 for semiconductor boule vacuum pumps. Ferritic materials.
Pump Inlet Screen/Filter
Stainless screens protecting pump in wafer fab lines. HTS 8414.90.91.40.
Vacuum Pump Mounting Bracket
Custom brackets for pump alignment in slicers. HTS 8414.90.91.40.
Vacuum Pump Baseplate
Machined aluminum baseplates mounting vacuum pumps in semiconductor grinder stations. HTS 8414.90.91.40 as structural parts of vacuum pumps for crystal boule grinding to wafer diameters. Vibration-damped design.
Vacuum Pump Heater Cartridge
Cartridge heaters for outgassing vacuum pump surfaces in semiconductor float zone crystal pullers. HTS 8414.90.91.40 for parts of vacuum pumps in monocrystalline semiconductor boule production. Elevates temps to 150°C for bakeout.
Gate Valve Actuator for Vacuum Pumps
Pneumatic actuators operating gate valves on vacuum pump ports in wafer slicing saw exhaust. Classified HTS 8414.90.91.40 as vacuum pump parts for semiconductor wafer production from boules. Provides precise isolation.