Dry Vacuum Pump Scroll Plate
Precision-machined scroll plates in oil-free dry vacuum pumps used for clean pumping in semiconductor wafer lapping and polishing lines. HTS 8414.90.91.40 applies as parts of vacuum pumps for semiconductor material processing equipment. They enable contactless compression for contamination-free operation.
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Alternative Classifications
This product could be classified differently depending on its characteristics or intended use.
If for wafer slicing saw exhaust systems
Parts tied to wafer slicing from semiconductor boules have targeted statistical breaks.
If parts of metering or dispensing pumps
If adapted for precise gas metering rather than evacuation, it falls under metering pumps.
If for use in semiconductor device testing vacuum chambers
Testing apparatus components go to Chapter 90 instruments.
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Import Tips & Compliance
• Certify oil-free design and tolerances via ISO standards to distinguish from lubricated pumps
• Use commercial invoices specifying 'Semiconductor Wafer Processing Vacuum Pump Part' for CBP review
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