Dry Vacuum Pump Scroll Plate from Canada
Precision-machined scroll plates in oil-free dry vacuum pumps used for clean pumping in semiconductor wafer lapping and polishing lines. HTS 8414.90.91.40 applies as parts of vacuum pumps for semiconductor material processing equipment. They enable contactless compression for contamination-free operation.
Duty Rate — Canada → United States
10%
Rate breakdown
9903.05.2910%Except for products described in headings 9903.05.85–9903.05.93, articles the product of Canada, as provided for in U.S. note 52 to this subchapter
Import Tips
• Certify oil-free design and tolerances via ISO standards to distinguish from lubricated pumps
• Use commercial invoices specifying 'Semiconductor Wafer Processing Vacuum Pump Part' for CBP review