Turbo Molecular Vacuum Pump Rotor Assembly
This rotor assembly is a critical rotating component in turbo molecular vacuum pumps used for creating high vacuum levels in semiconductor wafer processing equipment. It falls under HTS 8414.90.91.40 as a part specifically designed for vacuum pumps employed in the growth and processing of semiconductor materials like silicon wafers. The high-speed rotor generates momentum transfer to evacuate gases efficiently.
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Alternative Classifications
This product could be classified differently depending on its characteristics or intended use.
If part of a semiconductor wafer manufacturing crystal grower or puller
Parts of pumps specifically for crystal growers/pullers (Czochralski method) in semiconductor boule production fall under the statistical subset.
If classified primarily as a rotary vane or bearing mechanism
If the rotor's mechanical function dominates over vacuum pumping, it may shift to general rotary valves or taps.
If integrated into semiconductor testing apparatus
Vacuum pump parts used in testing equipment for semiconductor devices are often classified in Chapter 90.
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Import Tips & Compliance
• Verify the part is exclusively for vacuum pumps in semiconductor processing via manufacturer specs to confirm 8414 classification
• Include detailed technical drawings and end-use statements in documentation to avoid misclassification as general machinery parts
Related Products under HTS 8414.90.91.40
Vacuum Pump Shaft Seal Kit
Mechanical shaft seal kits preventing leaks in pumps for crystal growers. HTS 8414.90.91.40 for semiconductor boule vacuum pumps. Ferritic materials.
Pump Inlet Screen/Filter
Stainless screens protecting pump in wafer fab lines. HTS 8414.90.91.40.
Vacuum Pump Mounting Bracket
Custom brackets for pump alignment in slicers. HTS 8414.90.91.40.
Vacuum Pump Baseplate
Machined aluminum baseplates mounting vacuum pumps in semiconductor grinder stations. HTS 8414.90.91.40 as structural parts of vacuum pumps for crystal boule grinding to wafer diameters. Vibration-damped design.
Vacuum Pump Heater Cartridge
Cartridge heaters for outgassing vacuum pump surfaces in semiconductor float zone crystal pullers. HTS 8414.90.91.40 for parts of vacuum pumps in monocrystalline semiconductor boule production. Elevates temps to 150°C for bakeout.
Gate Valve Actuator for Vacuum Pumps
Pneumatic actuators operating gate valves on vacuum pump ports in wafer slicing saw exhaust. Classified HTS 8414.90.91.40 as vacuum pump parts for semiconductor wafer production from boules. Provides precise isolation.