Vacuum Pump Foreline Trap Assembly
Foreline trap assemblies capture contaminants in the rough vacuum line of turbopumps for semiconductor crystal growth systems. Under HTS 8414.90.91.40 as vacuum pump parts for processing silicon boules into wafers. Prevents oil backstreaming into high-vacuum chambers.
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Alternative Classifications
This product could be classified differently depending on its characteristics or intended use.
If integral to crystal puller vacuum systems
Czochralski/float zone crystal grower pumps have dedicated provisions.
If functioning primarily as an industrial gas filter
Filter-centric designs classify under filtering apparatus rather than pump parts.
If part of automatic vacuum control in testing gear
Control/monitoring components for device testing shift to Chapter 90.
Not sure which classification is right?
Our AI classifier can analyze your specific product and recommend the correct HTS code with confidence.
Import Tips & Compliance
• Include pump compatibility data (e.g
• for Pfeiffer or Edwards models) in entry docs
• Declare as 'cleanroom compatible' materials (e.g
• PFA-lined) for proper valuation
Related Products under HTS 8414.90.91.40
Vacuum Pump Shaft Seal Kit
Mechanical shaft seal kits preventing leaks in pumps for crystal growers. HTS 8414.90.91.40 for semiconductor boule vacuum pumps. Ferritic materials.
Pump Inlet Screen/Filter
Stainless screens protecting pump in wafer fab lines. HTS 8414.90.91.40.
Vacuum Pump Mounting Bracket
Custom brackets for pump alignment in slicers. HTS 8414.90.91.40.
Vacuum Pump Baseplate
Machined aluminum baseplates mounting vacuum pumps in semiconductor grinder stations. HTS 8414.90.91.40 as structural parts of vacuum pumps for crystal boule grinding to wafer diameters. Vibration-damped design.
Vacuum Pump Heater Cartridge
Cartridge heaters for outgassing vacuum pump surfaces in semiconductor float zone crystal pullers. HTS 8414.90.91.40 for parts of vacuum pumps in monocrystalline semiconductor boule production. Elevates temps to 150°C for bakeout.
Gate Valve Actuator for Vacuum Pumps
Pneumatic actuators operating gate valves on vacuum pump ports in wafer slicing saw exhaust. Classified HTS 8414.90.91.40 as vacuum pump parts for semiconductor wafer production from boules. Provides precise isolation.