Vacuum Pump Foreline Trap Assembly from Japan
Foreline trap assemblies capture contaminants in the rough vacuum line of turbopumps for semiconductor crystal growth systems. Under HTS 8414.90.91.40 as vacuum pump parts for processing silicon boules into wafers. Prevents oil backstreaming into high-vacuum chambers.
Duty Rate — Japan → United States
12.5%
Rate breakdown
9903.05.4912.5%Except for products described in headings 9903.05.85–9903.05.92, articles the product of Japan, with an ad valorem (or ad valorem equivalent) rate of duty under column 1 less than 12.5 percent, as provided for in U.S. note 52 to this subchapter
Import Tips
• Include pump compatibility data (e.g
• for Pfeiffer or Edwards models) in entry docs
• Declare as 'cleanroom compatible' materials (e.g
• PFA-lined) for proper valuation