KLA-Tencor Surfscan SP7 Unpatterned Wafer Scanner
Surface scanning system for bare silicon wafer defectivity mapping using multi-angle darkfield optics and UV laser excitation. Detects haze, flatness deviations, and particles down to 20nm. Specifically for semiconductor wafer inspection under HTS 9031.41.00.
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Alternative Classifications
This product could be classified differently depending on its characteristics or intended use.
If used for non-semiconductor optical flatness measurement
Other optical instruments for checking flatness
If for general industrial surface inspection applications
Optical instruments for inspecting semiconductor devices shift specificity
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Import Tips & Compliance
• UV laser safety certification (IEC 60825) mandatory for customs clearance
• Specify wafer diameter range (200mm-450mm) in commercial invoice
• Avoid declaring as 'general surface scanner' to prevent misclassification
Related Products under HTS 9031.41.00
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