BrightSpot Automation OWL Reticle Inspector
Programmable illumination reticle inspection system for photomask qualification using multiple wavelength sources and aerial image sensor technology. Used in semiconductor mask houses. HTS 9031.41.00 for reticle inspection.
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If general photographic mask inspection equipment
Non-semiconductor specific photomask inspection
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Import Tips & Compliance
• Aerial image sensor technology specs distinguish classification
• Multiple wavelength source documentation required
• Mask house end-user statements prevent general optics classification
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