CVD Deposition Chamber Heat Exchanger
Plate heat exchanger for chemical vapor deposition chambers, cooling precursor gases and reactor walls during thin film deposition on semiconductor wafers. 8419.89.9540 for temperature change treatment in semiconductor manufacturing.
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Alternative Classifications
This product could be classified differently depending on its characteristics or intended use.
If complete CVD film deposition machinery
Full semiconductor deposition systems in 8479 including exchangers
If heat exchange units for general industrial use
Non-semiconductor specific exchangers classify differently
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Import Tips & Compliance
• Specify precursor gas thermal profiles and deposition uniformity data
• Classify as cooling exchanger, not reactor part
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