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CVD Deposition Chamber Heat Exchanger from Canada

Plate heat exchanger for chemical vapor deposition chambers, cooling precursor gases and reactor walls during thin film deposition on semiconductor wafers. 8419.89.9540 for temperature change treatment in semiconductor manufacturing.

Duty Rate — Canada → United States

64.2%

Rate breakdown

9903.03.1450%Articles the product of Canada as provided in subdivision (b)(3) of U.S. note 51 to this subchapter
9903.05.2910%Except for products described in headings 9903.05.85–9903.05.93, articles the product of Canada, as provided for in U.S. note 52 to this subchapter

Import Tips

• Specify precursor gas thermal profiles and deposition uniformity data

• Classify as cooling exchanger, not reactor part