Wafer Handling Vacuum Chuck

Precision vacuum chuck for holding semiconductor wafers during grinding, lapping, and polishing operations without mechanical clamps. Pneumatic-only design excludes electrical connectors. Falls under 8487.90.00 as semiconductor processing machinery part.

Import Duty Rates by Country of Origin

Origin CountryMFN RateCh.99 SurchargesTotal Effective Rate
🇨🇳China3.9%+35.0%38.9%
🇲🇽Mexico3.9%+10.0%13.9%
🇨🇦Canada3.9%+10.0%13.9%
🇩🇪Germany3.9%+10.0%13.9%
🇯🇵Japan3.9%+10.0%13.9%

More Specific Codes

This product may fall under a more specific subheading:

Alternative Classifications

This product could be classified differently depending on its characteristics or intended use.

8414.80Lower: 13.7% vs 38.9%

If standalone vacuum pumps/air compressors

Separate air/vacuum pumps shift to 8414 regardless of end use.

9031.80Lower: 10% vs 38.9%

If with integrated measuring/positioning features

Measuring or positioning chucks with electrical features go to Chapter 90.

Not sure which classification is right?

Our AI classifier can analyze your specific product and recommend the correct HTS code with confidence.

Import Tips & Compliance

Document vacuum port specifications and surface flatness tolerances for wafer sizes

Verify purely pneumatic operation without solenoids

Pitfall: reclassification to Chapter 84 if electrical vacuum pumps included

Related Products under HTS 8487.90.00

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The furnace chamber is a critical replaceable part in Czochralski crystal pullers used to grow monocrystalline silicon boules for semiconductor wafers. It provides the high-temperature controlled environment necessary for the pulling process without electrical components. Classified under 8487.90.00 as a machinery part not specified elsewhere in Chapter 84.

Float Zone Crystal Grower Quartz Crucible

High-purity quartz crucible used in float zone crystal growers to contain molten silicon during the zone refining process for semiconductor material production. This non-electrical part maintains material purity at extreme temperatures. Falls under 8487.90.00 as an unspecified machinery part for semiconductor equipment.

Wafer Slicing Diamond Wire Saw Blade

Precision diamond wire saw blade designed specifically for slicing semiconductor boules into thin wafers with minimal material loss. This consumable cutting part lacks electrical features and is essential for wafer preparation equipment. Classified in 8487.90.00 as other machinery parts.

Crystal Boule Grinder Workholding Chuck

Precision workholding chuck for securing semiconductor crystal boules during diameter grinding to wafer specifications. This mechanical part ensures accurate rotation without electrical components. Under 8487.90.00 for unspecified semiconductor grinding machinery parts.

Wafer Lapping Plate

Cast iron or composite lapping plate used in semiconductor wafer grinders/lappers to achieve precise flatness and thickness uniformity on wafer surfaces before fabrication. Purely mechanical surface finishing part without electrical features. Classified 8487.90.00 as other machinery component.

Semiconductor Wafer Polishing Pad

Polyurethane polishing pad engineered for chemical mechanical planarization (CMP) of semiconductor wafers to atomic-level surface finish. This consumable part interfaces with polishing platens in wafer processing equipment. 8487.90.00 for non-electrical machinery parts.