RTP Rapid Thermal Processor Chiller
High-capacity chiller for rapid thermal processing (RTP) systems, enabling millisecond temperature ramps up to 1200°C followed by controlled cooling for wafer annealing. 8419.89.9540 for semiconductor thermal treatment cooling equipment. Critical for dopant activation.
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Import Tips & Compliance
• Provide RTP ramp rate data and wafer temperature uniformity specifications
• Distinguish cooling function from RTP lamp heating to stay in 8419
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