RTP Rapid Thermal Processor Chiller from Canada
High-capacity chiller for rapid thermal processing (RTP) systems, enabling millisecond temperature ramps up to 1200°C followed by controlled cooling for wafer annealing. 8419.89.9540 for semiconductor thermal treatment cooling equipment. Critical for dopant activation.
Duty Rate — Canada → United States
14.2%
Rate breakdown
9903.05.2910%Section 301 (forced labor) — additional 10% ad valorem on products of Canada
Import Tips
• Provide RTP ramp rate data and wafer temperature uniformity specifications
• Distinguish cooling function from RTP lamp heating to stay in 8419