Wafer Slicing Saw Vacuum Pump

Vacuum pump integrated with diamond wire wafer slicing saws to remove slurry and maintain clean environment during slicing of semiconductor wafers from boules. Falls under HTS 8414.10.00.00 as dedicated vacuum pump for wafer preparation.

Import Duty Rates by Country of Origin

Origin CountryMFN RateCh.99 SurchargesTotal Effective Rate
🇨🇳China2.5%+35.0%37.5%
🇲🇽Mexico2.5%+10.0%12.5%
🇨🇦Canada2.5%+10.0%12.5%
🇩🇪Germany2.5%+10.0%12.5%
🇯🇵Japan2.5%+10.0%12.5%

Alternative Classifications

This product could be classified differently depending on its characteristics or intended use.

8466.94Lower: 14.7% vs 37.5%

If considered a part of semiconductor wafer processing machines

Parts for semiconductor manufacturing tools classified with the machines in Chapter 84.

8421.29.00Lower: 35% vs 37.5%

If for general industrial liquid filtering applications

Industrial filtering/separating equipment outside semiconductor notes.

Not sure which classification is right?

Our AI classifier can analyze your specific product and recommend the correct HTS code with confidence.

Import Tips & Compliance

• Document connection to wafer slicing saws with OEM specifications for proper HTS verification

• Declare any abrasive slurry handling features that affect classification

Related Products under HTS 8414.10.00.00

Float Zone Crystal Growth Vacuum Pump

High-vacuum pump designed for float zone method crystal growers, maintaining ultra-clean vacuum conditions to produce pure semiconductor boules. Classified under HTS 8414.10.00.00 for vacuum pumps in semiconductor wafer manufacturing.

Crystal Boule Grinder Vacuum Pump

Dry vacuum pump for crystal grinders that shape semiconductor boules to precise diameters and flats indicating conductivity type. HTS 8414.10.00.00 covers this wafer preparation vacuum equipment.

Dry Scroll Vacuum Pump for Wafer Processing

Dry scroll vacuum pump providing oil-free vacuum for load lock chambers in semiconductor wafer processing tools. Falls under HTS 8414.10.00.00 as specified in wafer manufacturing equipment notes.

Semiconductor Wafer Polisher Vacuum Pump

Turbo-molecular vacuum pump for chemical mechanical polishers achieving mirror-finish wafer surfaces within nanometer flatness for fabrication processes. HTS 8414.10.00.00 for vacuum pumps in wafer polishing equipment.

Czochralski Crystal Puller Vacuum Pump

A specialized vacuum pump used in Czochralski crystal growers to create a vacuum environment for producing monocrystalline silicon boules from which semiconductor wafers are sliced. It falls under HTS 8414.10.00.00 as a vacuum pump essential for semiconductor manufacturing equipment.

Wafer Lapping Vacuum Extraction Pump

Oil-free vacuum pump for wafer lappers that extracts lapping slurry and maintains flatness tolerances during semiconductor wafer surface preparation. Classified in HTS 8414.10.00.00 per statistical notes for wafer preparation equipment.