Vacuum pumps
Air or vacuum pumps, air or other gas compressors and fans; ventilating or recycling hoods incorporating a fan, whether or not fitted with filters; gas-tight biological safety cabinets, whether or not fitted with filters; parts thereof: > Vacuum pumps
Duty Rate (from China)
Except for products described in headings 9903.03.02–9903.03.11, articles the product of any country, as provided for in subdivision (aa) of U.S. note 2 to this subchapter
Except as provided in headings 9903.88.13, 9903.88.18, 9903.88.33, 9903.88.34, 9903.88.35, 9903.88.36, 9903.88.37, 9903.88.38, 9903.88.40, 9903.88.41, 9903.88.43, 9903.88.45, 9903.88.46, 9903.88.48, 9903.88.56, 9903.88.64, 9903.88.66, 9903.88.67, 9903.88.68, or 9903.88.69, articles the product of China, as provided for in U.S. note 20(e) to this subchapter and as provided for in the subheadings enumerated in U.S. note 20(f)
Products classified under HTS 8414.10.00.00
Float Zone Crystal Growth Vacuum Pump
High-vacuum pump designed for float zone method crystal growers, maintaining ultra-clean vacuum conditions to produce pure semiconductor boules. Classified under HTS 8414.10.00.00 for vacuum pumps in semiconductor wafer manufacturing.
Crystal Boule Grinder Vacuum Pump
Dry vacuum pump for crystal grinders that shape semiconductor boules to precise diameters and flats indicating conductivity type. HTS 8414.10.00.00 covers this wafer preparation vacuum equipment.
Dry Scroll Vacuum Pump for Wafer Processing
Dry scroll vacuum pump providing oil-free vacuum for load lock chambers in semiconductor wafer processing tools. Falls under HTS 8414.10.00.00 as specified in wafer manufacturing equipment notes.
Semiconductor Wafer Polisher Vacuum Pump
Turbo-molecular vacuum pump for chemical mechanical polishers achieving mirror-finish wafer surfaces within nanometer flatness for fabrication processes. HTS 8414.10.00.00 for vacuum pumps in wafer polishing equipment.
Czochralski Crystal Puller Vacuum Pump
A specialized vacuum pump used in Czochralski crystal growers to create a vacuum environment for producing monocrystalline silicon boules from which semiconductor wafers are sliced. It falls under HTS 8414.10.00.00 as a vacuum pump essential for semiconductor manufacturing equipment.
Wafer Slicing Saw Vacuum Pump
Vacuum pump integrated with diamond wire wafer slicing saws to remove slurry and maintain clean environment during slicing of semiconductor wafers from boules. Falls under HTS 8414.10.00.00 as dedicated vacuum pump for wafer preparation.
Wafer Lapping Vacuum Extraction Pump
Oil-free vacuum pump for wafer lappers that extracts lapping slurry and maintains flatness tolerances during semiconductor wafer surface preparation. Classified in HTS 8414.10.00.00 per statistical notes for wafer preparation equipment.
Diaphragm Vacuum Pump for Crystal Processing
Corrosion-resistant diaphragm vacuum pump for evacuating crystal growth furnaces during semiconductor boule processing. HTS 8414.10.00.00 classification for vacuum pumps in statistical note (a)(i).