Fused Silica Wafer Boat Support
Fused silica holder designed to support multiple wafer boats within oxidation furnaces for semiconductor production. Provides thermal uniformity and contamination-free handling. HTS 7020.00.30.00 covers such specialized quartz furnace components.
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Alternative Classifications
This product could be classified differently depending on its characteristics or intended use.
If refractory alumina or zirconia construction instead of quartz
High-temperature ceramic furnace supports classify in 6902, excluding glass
If constructed from glass wool or fibrous quartz material
Fibrous glass products per Chapter 70 note fall in 7019, not solid quartz articles
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Import Tips & Compliance
• Declare maximum wafer capacity and boat spacing to confirm furnace holder design
• Ensure cleanroom packaging; particulate contamination major import issue
• Provide thermal expansion coefficient data matching silicon wafers
Related Products under HTS 7020.00.30.00
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