High-Purity Fluorine Gas for Semiconductor Etching
Ultra-pure F2 gas in specialized monel-lined cylinders for plasma etching in microchip manufacturing. HTS 2801.30.10.00 applies as chemically defined elemental fluorine, essential for precise silicon dioxide removal in electronics.
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Alternative Classifications
This product could be classified differently depending on its characteristics or intended use.
If Carbonyl fluoride (COF2) as halide oxide of carbon with fluorine
Classified under 2812 for halide oxides containing fluorine, separate from pure F2.
If saturated acyclic hydrocarbons fluorinated like tetrafluoroethylene
Organic halogenated hydrocarbons move to Chapter 29.
If doped silicon wafers etched with fluorine residue
Doped semiconductor materials with fluorine processing fall under 3818.
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Import Tips & Compliance
• Cleanroom-compatible packaging required; provide semiconductor end-use certification to expedite FDA/CBP review
• Monitor for nickel fluoride formation in monel containers; common issue is purity drop during transit
• Pair with NF2 or CF4 imports under complementary codes for process kits
Related Products under HTS 2801.30.10.00
Compressed Fluorine Gas Cylinder
A high-pressure steel cylinder containing pure fluorine gas (F2), used in specialized industrial applications such as chemical synthesis and etching processes. It falls under HTS 2801.30.10.00 as it is elemental fluorine, a diatomic gas classified as a halogen in Chapter 28 for chemically defined inorganic compounds.
Liquid Fluorine in Cryogenic Dewar
Cryogenically cooled dewar flask containing liquefied fluorine (boiling point -188°C), supplied to research labs for rocket propulsion and plasma etching. Classified under HTS 2801.30.10.00 as pure fluorine in liquid state, meeting Chapter 28 definitions for elemental halogens.
Fluorine Gas Generator Byproduct Flask
Small lecture bottle of fluorine generated from electrolysis of KF-HF melt, used in university chemistry demonstrations. Falls under 2801.30.10.00 as distilled elemental fluorine gas, per Chapter 28 halogen provisions.
Industrial Fluorine for Uranium Enrichment
Bulk fluorine gas shipment for UF6 production in nuclear fuel cycles, shipped in tonnage tube trailers. HTS 2801.30.10.00 covers this elemental fluorine as precursor for volatile uranium hexafluoride.
Research-Grade Fluorine in PTFE-Lined Cylinder
99.99% pure F2 in polytetrafluoroethylene-lined aluminum cylinder for materials science research on fluoropolymers. Classified in 2801.30.10.00 as chemically defined fluorine gas per Chapter 28 Note 1.