KLA-Tencor eDR Series Electron Beam Defect Review System
The KLA-Tencor eDR Series Electron Beam Defect Review System combines electron beam imaging with robotic wafer transport for defect review on patterned semiconductor wafers. It falls under tariff item 9031.80.00 as an 'other instrument' for measuring or checking semiconductor defects, given its metrology and inspection functions.
Import Duty Rates by Country of Origin
| Origin Country | MFN Tariff | Surtaxes | Total Effective Rate |
|---|---|---|---|
| 🇨🇳China | Free | — | Free |
| 🇲🇽Mexico | Free | — | Free |
| 🇺🇸United States | Free | — | Free |
| 🇩🇪Germany | Free | — | Free |
| 🇯🇵Japan | Free | — | Free |
More Specific Codes
This product may fall under a more specific subheading:
Alternative Classifications
This product could be classified differently depending on its characteristics or intended use.
If the system is used primarily for imaging defects
Microscopes for imaging may fall under heading 90.12.
Not sure which classification is right?
The Tariff Assistant works through the GRI rules on your specific product to reach the right tariff item — and can price the duty on it in the same conversation.
Import Tips & Compliance
• Ensure the system is declared as a measuring instrument for semiconductor defects, not as a general inspection device
• Provide documentation on the robotic wafer handling and defect measurement capabilities
• Check for eligibility under the Accelerated Remission Program for manufacturing equipment
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