KLA-Tencor eDR Series Electron Beam Defect Review System from United States
The KLA-Tencor eDR Series Electron Beam Defect Review System combines electron beam imaging with robotic wafer transport for defect review on patterned semiconductor wafers. It falls under tariff item 9031.80.00 as an 'other instrument' for measuring or checking semiconductor defects, given its metrology and inspection functions.
Duty Rate — United States → Canada
0%
Import Tips
• Ensure the system is declared as a measuring instrument for semiconductor defects, not as a general inspection device
• Provide documentation on the robotic wafer handling and defect measurement capabilities
• Check for eligibility under the Accelerated Remission Program for manufacturing equipment