KLA-Tencor eDR Series Electron Beam Defect Review System from China
The KLA-Tencor eDR Series combines electron beam imaging with robotic wafer transport for defect review on patterned semiconductor wafers. It is classified under tariff item 9031.80.00 as an other measuring or checking instrument for semiconductor inspection.
Duty Rate — China → Canada
0%
Import Tips
• Ensure the system is classified under 9031.80.00 as a measuring instrument, not as a machine of Chapter 84
• Provide CBSA with technical documentation on its defect review and measurement functions
• Check for any special permits for semiconductor equipment