Multi-Wafer Cassette Optical Inspector
Non-contact optical system inspecting multiple semiconductor wafers in FOUP cassettes for particles and positioning without removal. Critical for fab logistics. Classified HTS 9031.41.0060 for other wafer inspection optics.
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Alternative Classifications
This product could be classified differently depending on its characteristics or intended use.
If other non-optical measuring instruments
Non-optical cassette monitoring systems.
If wafer handling robot with inspection
Automated handling equipment with secondary inspection.
If cassette components rather than inspection system
Plastic articles if primarily structural vs. optical inspection.
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Import Tips & Compliance
• Specify FOUP compatibility (300mm wafers) and throughput specs
• Classify as inspection instrument, not storage/accessory equipment
• Include particle counting sensitivity documentation
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