Wafer Sorter Cassette Elevator
Automated cassette elevator mechanism for wafer preparation equipment that transfers FOUPs/cassettes between process modules while maintaining contamination control. Part of 8479.89.10 wafer preparation systems under 8479.90.41.00.
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Alternative Classifications
This product could be classified differently depending on its characteristics or intended use.
If general elevators/lifts
Passenger/industrial elevators classify separately from semiconductor handling
If complete wafer handling robot
Complete handling machines classify as finished equipment, not parts
Not sure which classification is right?
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Import Tips & Compliance
• Document FOUP size compatibility (300mm SEMI standard) and cleanroom rating,Include particle generation specs (<5 particles/ft³ at 0.1μm),Not general elevators under 8428
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