Deposition Chamber Vacuum Controller
PCA monitoring turbopump speed and pressure in PVD/CVD chambers depositing thin films on semiconductor wafers. Under HTS 8473.30.1180 as printed circuit part principally for 8471 deposition machines, no CRT. Base pressure <10^-7 Torr.
Import Duty Rates by Country of Origin
Alternative Classifications
This product could be classified differently depending on its characteristics or intended use.
If vacuum pump parts generally
Pumps and parts in Chapter 84 if not machine-specific.
If electronic vacuum gauges
Pressure measuring instruments in Chapter 90.
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Import Tips & Compliance
• Ultimate pressure specs documented
• Throttling valve integration proof
• Helium leak rate certifications
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