Semiconductor Slurry Mist Eliminator
Coalescing filter system eliminating aerosolized chemical slurries from wafer grinding/lapping exhaust, preventing fab contamination. HTS 8421.39.0115 for gas purification in wafer prep equipment. Protects downstream polishers and etchers.
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Alternative Classifications
This product could be classified differently depending on its characteristics or intended use.
If non-semiconductor chemical processing
Other oil/gas industry mist eliminators.
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Import Tips & Compliance
• Chemical compatibility certs for CMP slurries
• Droplet capture efficiency data
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