Other
Centrifuges, including centrifugal dryers; filtering or purifying machinery and apparatus, for liquids or gases; parts thereof: > Filtering or purifying machinery and apparatus for gases: > Other > Dust collection and air purification equipment: > Other
Duty Rate (from China)
Except for products described in headings 9903.03.02–9903.03.11, articles the product of any country, as provided for in subdivision (aa) of U.S. note 2 to this subchapter
Except as provided in headings 9903.88.05, 9903.88.06, 9903.88.07, 9903.88.08, 9903.88.10, 9903.88.11, 9903.88.14, 9903.88.19, 9903.88.50, 9903.88.52, 9903.88.58, 9903.88.60, 9903.88.62, 9903.88.66, 9903.88.67, 9903.88.68, or 9903.88.69, articles the product of China, as provided for in U.S. note 20(a) to this subchapter and as provided for in the subheadings enumerated in U.S. note 20(b) [to this subchapter]
Products classified under HTS 8421.39.01.15
300mm Silicon Wafer Prep Dust Extraction Hood
Localized dust collection hood for 300mm wafer preparation lines including slicing, grinding, and polishing stations, filtering process-generated airborne particles. HTS 8421.39.0115 for semiconductor wafer manufacturing air purification equipment. Supports high-volume production of logic/memory wafers.
Czochralski Crystal Puller
A specialized centrifuge apparatus used in semiconductor manufacturing to grow monocrystalline silicon boules by pulling crystals from molten silicon via the Czochralski method. It falls under HTS 8421.39.0115 as dust collection and air purification equipment because it incorporates integrated filtering systems to remove impurities and particulates from the inert gas atmosphere during crystal growth. This ensures ultra-clean conditions essential for high-purity semiconductor production.
Float Zone Crystal Grower
Centrifugal apparatus employing the float zone method to purify and grow semiconductor crystals like silicon by melting and recrystallizing zones in a controlled inert gas environment with dust filtration. Classified under HTS 8421.39.0115 due to its built-in air purification systems that filter out particulates to prevent contamination during high-vacuum zone refining. Critical for producing ultra-pure silicon ingots for wafer slicing.
Semiconductor Wafer Crystal Grinder Dust Collector
Integrated filtering and purification system attached to crystal grinders used to shape semiconductor boules to precise diameters, collecting diamond slurry and silicon dust particles from the air stream. Falls under HTS 8421.39.0115 as specialized dust collection equipment for maintaining clean air in wafer preparation environments. Essential for preventing airborne contaminants from affecting subsequent wafer processing.
Gallium Arsenide Crystal Puller Gas Purifier
Purification apparatus for inert gas lines in GaAs crystal growth centrifuges, removing moisture, oxygen, and particulates to achieve ppb-level purity required for compound semiconductor production. HTS 8421.39.0115 classification applies due to its role in dust collection and air cleaning specific to semiconductor boule formation equipment. Prevents defects in high-value GaAs wafers used in RF and optoelectronics.
Wafer Slicing Saw Air Filtration Unit
Dust collection and mist filtration system for inner diameter saws that slice semiconductor wafers from crystal boules, capturing silicon particles and coolant aerosols from the cutting process. Under HTS 8421.39.0115 as air purification equipment integral to wafer preparation machinery in semiconductor fabs. Maintains ISO Class 1 cleanroom standards during high-volume wafer production.
Silicon Wafer Lapping Machine Exhaust Purifier
Gas and particulate filtration unit for exhaust from wafer lapping equipment that grinds wafers to precise thickness tolerances, removing abrasive slurry mists and silicon fines. Classified in HTS 8421.39.0115 for its dust collection role in semiconductor wafer preparation processes as per statistical notes. Critical for downstream flatness polishing and device fabrication.
Semiconductor Polisher Air Particle Collector
High-efficiency particulate air (HEPA) collector designed for chemical mechanical polishers that achieve mirror-flat wafer surfaces for device fabrication, capturing nano-scale slurry particles. HTS 8421.39.0115 applies as dust collection equipment for wafer preparation apparatus per chapter statistical notes. Enables defect-free semiconductor wafers for advanced nodes.
Boule Flatting Grinder Filtration System
Air purification module for grinders that create orientation flats on semiconductor crystal boules to indicate resistivity and doping type. Captures grinding dust to protect wafer yield; under HTS 8421.39.0115 as dust collection for statistical note (b)(ii)(A) equipment. Vital for accurate wafer identification in fabs.
Crystal Boule Inspection Area Air Purifier
Laminar flow purification unit over boule inspection stations post-grinding, providing particle-free air for defect assessment before slicing. Falls under HTS 8421.39.0115 as air purification supporting statistical note wafer preparation equipment. Ensures boule quality data integrity.
Semiconductor Slurry Mist Eliminator
Coalescing filter system eliminating aerosolized chemical slurries from wafer grinding/lapping exhaust, preventing fab contamination. HTS 8421.39.0115 for gas purification in wafer prep equipment. Protects downstream polishers and etchers.
Epi-Ready Wafer Cleaner Air Filtration Module
Pre-diffusion cleaning station filtration removing particulates before epitaxial growth, ensuring epi-ready wafer surfaces. Classified HTS 8421.39.0115 as air purification for wafer processing apparatus. Bridges prep to front-end fabrication.
Diamond Slurry Grinder Ventilation Unit
Ventilation and filtration capturing diamond abrasive particles from boule/wafer grinders using electrostatic precipitators. HTS 8421.39.0115 for semiconductor dust collection equipment. Handles hazardous nano-diamond dust safely.
Monocrystalline Ingot Air Shower Purifier
Personnel and equipment air shower with semiconductor-grade HEPA filtration for clean transfer of crystal ingots to slicing areas. Under HTS 8421.39.0115 as air purification supporting wafer manufacturing equipment chain. Prevents human-sourced contamination.
Wafer Edge Grinder Particle Trap
Localized particle trapping system for edge profiling grinders that create chip-separation geometry on wafers post-polish. HTS 8421.39.0115 for dust collection in final wafer preparation steps. Ensures edge quality for dicing yield.