Semiconductor Slurry Mist Eliminator from Canada
Coalescing filter system eliminating aerosolized chemical slurries from wafer grinding/lapping exhaust, preventing fab contamination. HTS 8421.39.0115 for gas purification in wafer prep equipment. Protects downstream polishers and etchers.
Duty Rate — Canada → United States
10%
Rate breakdown
9903.05.2910%Except for products described in headings 9903.05.85–9903.05.93, articles the product of Canada, as provided for in U.S. note 52 to this subchapter
Import Tips
• Chemical compatibility certs for CMP slurries
• Droplet capture efficiency data