RTP Furnace Lamp Reflector Assembly
High-reflectivity reflector assembly for directing thermal radiation in Rapid Thermal Processing (RTP) furnaces for semiconductor annealing. HTS 8417.90.00.00 as parts of nonelectric industrial ovens using radiative heating for wafer processing. Gold or specialized coatings maximize thermal efficiency.
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Import Tips & Compliance
• Specify reflectivity coefficients (>95% at target wavelengths); document RTP process temperatures (>1000°C in seconds); distinguish from lighting reflectors
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