CMP Wafer Polisher Slurry Feed Compressor Diaphragm
Corrosion-resistant diaphragm for hermetic compressors delivering polishing slurry to chemical mechanical planarization (CMP) pads on wafer polishers. Ensures contamination-free delivery at precise pressures. Classified under 8414.90.41.55 for semiconductor wafer finishing compressors.
Import Duty Rates by Country of Origin
Alternative Classifications
This product could be classified differently depending on its characteristics or intended use.
If imported as plastic diaphragm material
Plastic fittings exclude assembled compressor parts.
If general mechanical slurry appliances
Non-semiconductor specific processing machinery.
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Import Tips & Compliance
• Specify chemical resistance to CMP slurries (silica, ceria, etc.)
• Include pressure pulsation specs for uniform polishing
• Distinguish from 3917 plastic diaphragms by compressor function
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