EUV Mask Inspector
A specialized inspector for extreme ultraviolet (EUV) lithography masks, detecting phase defects and absorber irregularities critical for advanced semiconductor nodes. It uses actinic wavelength imaging to perform optical inspection. This qualifies as an other optical measuring or checking instrument under tariff item 9031.49.90.
Import Duty Rates by Country of Origin
| Origin Country | MFN Tariff | Surtaxes | Total Effective Rate |
|---|---|---|---|
| 🇨🇳China | Free | — | Free |
| 🇲🇽Mexico | Free | — | Free |
| 🇺🇸United States | Free | — | Free |
| 🇩🇪Germany | Free | — | Free |
| 🇯🇵Japan | Free | — | Free |
Alternative Classifications
This product could be classified differently depending on its characteristics or intended use.
If the inspector is designed as a coordinate measuring machine
Coordinate measuring machines are classified separately in the same subheading.
If the inspector uses electron beam microscopy
Microscopes using other than optical means fall under heading 90.12.
Not sure which classification is right?
The Tariff Assistant works through the GRI rules on your specific product to reach the right tariff item — and can price the duty on it in the same conversation.
Import Tips & Compliance
• Provide CBSA with documentation showing the actinic imaging technology to confirm classification as an optical instrument
• Check if the inspector qualifies for tariff relief under programs for scientific or semiconductor equipment
• Confirm whether the goods are subject to any export controls from the country of origin before shipping
Related Products under Tariff item 9031.49.90
Autocollimator Optical Alignment System
The Autocollimator Optical Alignment System is a precision instrument measuring small angular deviations for machine tool alignment and optical testing. It is an electronic autocollimator used in metrology laboratories, fitting under tariff item 9031.49.90 as an 'Other' optical measuring instrument.
Chromatic Confocal Sensor
The Chromatic Confocal Sensor is a non-contact optical sensor using chromatic aberration for high-speed surface profiling and thickness measurement. It is an advanced optical measuring technology under tariff item 9031.49.90 for inline production monitoring.
Confocal Laser Scanning Gauge
The Confocal Laser Scanning Gauge is a point sensor using confocal laser scanning for precise distance and thickness measurement in production lines. It is an industrial optical measuring instrument under tariff item 9031.49.90 for automated quality control.
Conoscopic Holography Sensor
The Conoscopic Holography Sensor is a compact optical sensor using conoscopic holography for 3D surface profiling and vibration analysis. It is an advanced optical measuring instrument under tariff item 9031.49.90 for R&D and production metrology applications.
Digital Holographic Microscope
The Digital Holographic Microscope combines digital holography with microscopy for 3D quantitative imaging and surface metrology. It falls under tariff item 9031.49.90 when the measurement function predominates over microscopic observation.
DUV Mask Metrology Station
A deep ultraviolet metrology station used to measure chrome patterns, quartz thickness, and defectivity on DUV photomasks in semiconductor fabs. It is automated for high-volume inspection and relies on optical measurement techniques. This places it under tariff item 9031.49.90 as an other optical measuring or checking instrument.