Structured Light Wafer Scanner from Japan
Fringe projection structured light optical system for full-field 3D wafer shape measurement. Detects subtle global distortions affecting lithography overlay. HTS 9031.41.00.40 classification for specialized wafer inspection optics.
Duty Rate — Japan → United States
0%
Rate breakdown
9903.05.860%Articles provided for in subdivision (b) of U.S. note 52 to this subchapter
Import Tips
• Fringe pattern resolution and projector wavelength specifications needed
• Distinguish from general 3D scanners via semiconductor flatness standards
• Software metrology algorithms may require separate IT classification