Numatics Proportional Valve G3 Series
Pneumatic actuator valve for precise slurry flow control in CMP polishers during semiconductor wafer processing. HTS 8481.80.9035 due to proportional operation by process controller signals. Essential for uniform material removal rates in wafer surface planarization.
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Alternative Classifications
This product could be classified differently depending on its characteristics or intended use.
If other pneumatic control valves not proportional
Standard pneumatic valves without proportional signal response.
If integral to filtering apparatus
Proportional valves permanently installed in semiconductor filters classify with apparatus.
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Import Tips & Compliance
• Specify chemical resistance for CMP slurries (e.g
• silica-based) in material certs
• Avoid reclassification by documenting individual valve signal input vs manifold control
• Check Section 301 exclusions for semiconductor processing equipment
Related Products under HTS 8481.80.90.35
SMC PVQ30 Series Pneumatic Proportional Valve
A high-precision valve with pneumatic actuator for proportional pressure regulation in float zone crystal growers used for semiconductor wafer production. Classified under HTS 8481.80.9035 for its signal-responsive proportional operation in monocrystalline silicon processing. Essential for maintaining ultra-pure inert gas atmospheres during crystal pulling.
Festo VPPM Proportional Pressure Control Valve
Pneumatically actuated valve designed for dynamic pressure control in wafer slicing saw coolant systems, responding proportionally to PLC signals. HTS 8481.80.9035 applies due to its semiconductor manufacturing application in maintaining precise tolerances during boule slicing. Critical for flatness control in wafer preparation equipment.
ASCO 551 Series Proportional Solenoid Control Valve
This pneumatic actuator-equipped control valve modulates flow precisely based on electrical signals from a PLC in semiconductor wafer processing systems. It falls under HTS 8481.80.9035 due to its design for proportional operation by a control device signal, specifically for gas delivery in crystal growers. Used in Czochralski pullers to maintain stable pressure during silicon boule formation.
Burkert Type 3360 Proportional Solenoid Valve
Compact pneumatic proportional valve for DI water flow control in crystal grinders and polishers during semiconductor wafer prep. Meets HTS 8481.80.9035 criteria for signal-controlled operation in boule grinding to precise diameters. Ensures flatness tolerances critical for subsequent device fabrication.
Parker PV Series Pneumatic Proportional Valve
High-flow proportional control valve with pneumatic actuator for nitrogen purging in wafer lapping equipment. Classified HTS 8481.80.9035 for proportional signal response in semiconductor surface preparation. Maintains consistent pressure for achieving nanometer-level wafer flatness.