Wafer Rinse Centrifuge Basket
Perforated titanium basket that holds wafer carriers during high-speed spin-rinsing in semiconductor post-CMP cleaning. A centrifuge part under HTS 8421.99.01 for liquid removal.
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More Specific Codes
This product may fall under a more specific subheading:
Alternative Classifications
This product could be classified differently depending on its characteristics or intended use.
If part of dedicated wafer cleaning station
Cleaning tools for semiconductors classify in Chapter 84 specifics.
If titanium fabrication without assembly
Unwrought or semi-finished titanium in Chapter 81.
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Import Tips & Compliance
• Wafer carrier compatibility specs and surface finish (Ra <0.1um) docs needed
• Mark as 'semiconductor centrifuge part' explicitly
Related Products under HTS 8421.99.01
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Drum assembly for centrifuges recovering PGMEA solvents from photoresist waste in semiconductor lithography areas. Parts of centrifuges for liquids in HTS 8421.99.01.
UF Water Filter Module Frame
Aluminum frame holding ultrafiltration membrane modules for ultrapure water production in semiconductor DI systems. Filtering apparatus part in HTS 8421.99.01.
Spin Dryer Impeller Assembly
High-speed impeller that directs airflow in wafer spin dryers for post-rinse drying in semiconductor lines. Part of centrifugal dryers under HTS 8421.99.01.
Process Gas coalescing Filter Bowl
Pressure vessel bowl collecting liquid aerosols from coalescing filters in semiconductor bulk gas lines. Gas filtering part per HTS 8421.99.01.
Photoresist Filter Head Assembly
Head connecting high-pressure photoresist filters in dispense systems for semiconductor lithography coaters. Liquid filtering apparatus part in HTS 8421.99.01.
Exhaust Gas Quencher Nozzle Array
Array of spray nozzles in gas quenching modules rapidly cooling reactive semiconductor process exhaust before purification. Part of gas purifying systems under HTS 8421.99.01.