Solvent Recovery Centrifuge Drum
Drum assembly for centrifuges recovering PGMEA solvents from photoresist waste in semiconductor lithography areas. Parts of centrifuges for liquids in HTS 8421.99.01.
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Import Tips & Compliance
• VOC recovery efficiency data and explosion-proof certifications required
• Chemical resistance tables for solvents like NMP, PGMEA
• Avoid misclass as distillation equipment
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High-speed impeller that directs airflow in wafer spin dryers for post-rinse drying in semiconductor lines. Part of centrifugal dryers under HTS 8421.99.01.
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Pressure vessel bowl collecting liquid aerosols from coalescing filters in semiconductor bulk gas lines. Gas filtering part per HTS 8421.99.01.
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Head connecting high-pressure photoresist filters in dispense systems for semiconductor lithography coaters. Liquid filtering apparatus part in HTS 8421.99.01.
Exhaust Gas Quencher Nozzle Array
Array of spray nozzles in gas quenching modules rapidly cooling reactive semiconductor process exhaust before purification. Part of gas purifying systems under HTS 8421.99.01.
Point-of-Use Gas Scrubber Tank
Containment tank for wet scrubbers neutralizing acid gases at point-of-use in semiconductor process tools. Part of gas purifying apparatus under HTS 8421.99.01.