Wafer Filtering Pump Housing
A precision-machined housing for pumps in ultra-pure water filtering systems used in semiconductor wafer cleaning lines to purify process liquids. Classified under HTS 8421.99.01 as a part of filtering or purifying apparatus for liquids in high-tech manufacturing.
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More Specific Codes
This product may fall under a more specific subheading:
Alternative Classifications
This product could be classified differently depending on its characteristics or intended use.
If identified primarily as pump part
Pump housings are classified under pumps heading 8413 if not specific to filtering apparatus.
If dedicated for semiconductor wafer processing
Semiconductor-specific filtering parts shift to Chapter 84 semiconductor machinery provisions.
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Import Tips & Compliance
• Require particle contamination test reports (e.g
• <0.1um particles) to prove suitability for semiconductor use
• Document integration with DI water systems to prevent reclassification as general pump parts
Related Products under HTS 8421.99.01
Solvent Recovery Centrifuge Drum
Drum assembly for centrifuges recovering PGMEA solvents from photoresist waste in semiconductor lithography areas. Parts of centrifuges for liquids in HTS 8421.99.01.
UF Water Filter Module Frame
Aluminum frame holding ultrafiltration membrane modules for ultrapure water production in semiconductor DI systems. Filtering apparatus part in HTS 8421.99.01.
Spin Dryer Impeller Assembly
High-speed impeller that directs airflow in wafer spin dryers for post-rinse drying in semiconductor lines. Part of centrifugal dryers under HTS 8421.99.01.
Process Gas coalescing Filter Bowl
Pressure vessel bowl collecting liquid aerosols from coalescing filters in semiconductor bulk gas lines. Gas filtering part per HTS 8421.99.01.
Photoresist Filter Head Assembly
Head connecting high-pressure photoresist filters in dispense systems for semiconductor lithography coaters. Liquid filtering apparatus part in HTS 8421.99.01.
Exhaust Gas Quencher Nozzle Array
Array of spray nozzles in gas quenching modules rapidly cooling reactive semiconductor process exhaust before purification. Part of gas purifying systems under HTS 8421.99.01.