Gas Purifier Inlet Manifold
Stainless steel manifold that distributes process gases into point-of-use purifiers for removing impurities in semiconductor etching and deposition processes. It is a part of gas purifying apparatus under HTS 8421.99.01.
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More Specific Codes
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Alternative Classifications
This product could be classified differently depending on its characteristics or intended use.
If for semiconductor manufacturing tools
Gas purification parts integral to semiconductor process tools classified in 8479.
If considered general valve manifold
Manifolds with valve functions may fall under taps, cocks, valves in 8481.
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Import Tips & Compliance
• Provide gas compatibility certifications (e.g
• for NF3, ClF3) and pressure ratings
• Include bills of materials showing purifier assembly context for correct parts classification
Related Products under HTS 8421.99.01
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Aluminum frame holding ultrafiltration membrane modules for ultrapure water production in semiconductor DI systems. Filtering apparatus part in HTS 8421.99.01.
Spin Dryer Impeller Assembly
High-speed impeller that directs airflow in wafer spin dryers for post-rinse drying in semiconductor lines. Part of centrifugal dryers under HTS 8421.99.01.
Process Gas coalescing Filter Bowl
Pressure vessel bowl collecting liquid aerosols from coalescing filters in semiconductor bulk gas lines. Gas filtering part per HTS 8421.99.01.
Photoresist Filter Head Assembly
Head connecting high-pressure photoresist filters in dispense systems for semiconductor lithography coaters. Liquid filtering apparatus part in HTS 8421.99.01.
Exhaust Gas Quencher Nozzle Array
Array of spray nozzles in gas quenching modules rapidly cooling reactive semiconductor process exhaust before purification. Part of gas purifying systems under HTS 8421.99.01.