Epitaxial Reactor Cold Wall System from Japan
Cold wall cooling assembly for MOCVD epitaxial reactors, maintaining chamber walls at stable low temperatures during high-heat thin film deposition on wafers. Falls under 8419.89.9540 as cooling equipment for semiconductor processing temperature management. Critical for layer uniformity.
Duty Rate — Japan → United States
12.5%
Rate breakdown
9903.05.4912.5%Section 301 (forced labor) — Japan (col1 rate < 12.5 percent): MFN < 12.5% → total duty capped at 12.5%
Import Tips
• Submit reactor chamber thermal profile data proving cold wall cooling necessity
• Classify as complete cooling system, not reactor part, to avoid 8479