Leybold Graphix RXP 1600 Pump
14 kW stationary rotary roughing pump for evacuating semiconductor deposition chambers prior to high-vac processing. Fits HTS 8414.80.1665 for rotary stationary air/vacuum pumps 11.19-22.38 kW used in wafer fabrication.
Import Duty Rates by Country of Origin
Alternative Classifications
This product could be classified differently depending on its characteristics or intended use.
If other gas compressor, not air/vacuum
Compressors for specialty semiconductor gases (e.g., arsine) may classify under non-air provisions.
Not sure which classification is right?
The Tariff Assistant works through the GRI rules on your specific product to reach the right HTS code — and can price the duty on it in the same conversation.
Import Tips & Compliance
• Provide MTBF data for cleanroom reliability; common for 24/7 fab operations
• Classify as 'scroll rotary' if applicable to match exact mechanism
• Watch for set classification if shipped with filters as complete ventilating unit
Related Products under HTS 8414.80.16.65
Edwards EDP1200 Dry Rotary Pump
A 16 kW stationary dry rotary pump for semiconductor wafer lapping and polishing stations, providing contaminant-free vacuum. It matches HTS 8414.80.1665 as a rotary stationary air/vacuum pump in the specified power range for cleanroom semiconductor prep equipment.
Applied Materials Centura Rotary Compressor
A stationary rotary air compressor rated at 15 kW, designed for high-purity gas delivery in semiconductor wafer fabrication cleanrooms. It falls under HTS 8414.80.1665 due to its power range exceeding 11.19 kW but under 22.38 kW, stationary rotary configuration, and use in semiconductor manufacturing processes like crystal growth support.
Lam Research VMAX Rotary Vacuum Pump
Stationary rotary vacuum pump at 18 kW power output, specialized for evacuating chambers in semiconductor etching and deposition tools. Classified in HTS 8414.80.1665 for its rotary design, stationary installation, and power specs tailored to semiconductor processing environments.
Pfeiffer Vacuum HiPace 2300 Compressor
Stationary rotary compressor at 13.5 kW for gas handling in semiconductor crystal grower systems using Czochralski method. HTS 8414.80.1665 applies to its power rating, rotary stationary design, and role in semiconductor boule production.