Semiconductor Wafer Grinding Coolant Pump
High-precision pump for circulating coolant fluids during crystal grinding of semiconductor boules to exact wafer diameters. Essential in wafer preparation equipment to maintain temperature control and surface flatness as per statistical note (b)(ii)(A). Classified in HTS 8413.81.00 as other pumps for semiconductor liquids.
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More Specific Codes
This product may fall under a more specific subheading:
Alternative Classifications
This product could be classified differently depending on its characteristics or intended use.
If for industrial centrifugal pumping of non-corrosive coolants
Centrifugal pumps for general liquids may classify under 8413.70 if lacking semiconductor specificity.
If integral to mechanical grinding/lapping machines
Parts of grinding machines including liquid pumps classify with the complete apparatus in 8424.
If imported as spare parts rather than assembled pumps
Pump components for semiconductor equipment shift to parts subheading 8413.91.
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Import Tips & Compliance
• Include SEMI-standard specifications proving use in crystal boule grinding for tariff preference
• Maintain records of coolant fluid types used to demonstrate semiconductor-specific application
• Avoid general 'coolant pump' descriptions; specify wafer preparation context in invoices
Related Products under HTS 8413.81.00
Czochralski Crystal Puller Pump
This pump is integral to Czochralski crystal growers used in semiconductor manufacturing to produce monocrystalline silicon boules from which wafers are sliced. It circulates molten silicon precisely during the pulling process to ensure crystal purity and uniformity. Classified under HTS 8413.81.00 as an other pump for liquids fitted for specialized semiconductor material processing.
Float Zone Melting Process Pump
Specialized liquid pump used in float zone crystal growth equipment for semiconductor materials like silicon, handling inert gases liquefied or process fluids with extreme purity requirements. It maintains zone stability during the melting process to produce high-purity monocrystalline ingots. Falls under HTS 8413.81.00 as other pumps for semiconductor wafer manufacturing preparation.
Wafer Slicing Saw Coolant Circulation Pump
Pump designed for high-pressure coolant delivery in wafer slicing saws that cut monocrystalline semiconductor boules into thin wafers, as noted in statistical note (b)(ii)(B). Ensures clean cuts and prevents thermal damage during diamond saw operations. HTS 8413.81.00 covers these other specialized liquid pumps.
Semiconductor Wafer Lapping Fluid Pump
Precision metering pump for delivering lapping slurries and fluids in wafer preparation equipment to achieve critical flatness tolerances, per statistical note (b)(ii)(C). Used after slicing to prepare wafer surfaces for fabrication. Classifies under HTS 8413.81.00 as other liquid pumps for semiconductor processing.
Chemical Vapor Deposition Precursor Pump
Ultra-clean pump for liquid semiconductor precursors in CVD equipment used for wafer processing into devices. Handles volatile organic precursors with contamination-free delivery. HTS 8413.81.00 includes such other pumps for semiconductor manufacturing liquids.
Silicon Wafer Polishing Slurry Pump
Specialized pump circulating colloidal silica slurries for chemical-mechanical polishing (CMP) of semiconductor wafers to mirror finish required for fabrication. Critical for final surface preparation per statistical notes. Under HTS 8413.81.00 as other CMP liquid pumps.