Pumps
Pumps for liquids, whether or not fitted with a measuring device; liquid elevators; part thereof: > Other pumps; liquid elevators: > Pumps
Duty Rate (from China)
Except for products described in headings 9903.03.02–9903.03.11, articles the product of any country, as provided for in subdivision (aa) of U.S. note 2 to this subchapter
Except as provided in headings 9903.88.05, 9903.88.06, 9903.88.07, 9903.88.08, 9903.88.10, 9903.88.11, 9903.88.14, 9903.88.19, 9903.88.50, 9903.88.52, 9903.88.58, 9903.88.60, 9903.88.62, 9903.88.66, 9903.88.67, 9903.88.68, or 9903.88.69, articles the product of China, as provided for in U.S. note 20(a) to this subchapter and as provided for in the subheadings enumerated in U.S. note 20(b) [to this subchapter]
Subheadings
Products classified under HTS 8413.81.00
Czochralski Crystal Puller Pump
This pump is integral to Czochralski crystal growers used in semiconductor manufacturing to produce monocrystalline silicon boules from which wafers are sliced. It circulates molten silicon precisely during the pulling process to ensure crystal purity and uniformity. Classified under HTS 8413.81.00 as an other pump for liquids fitted for specialized semiconductor material processing.
Float Zone Melting Process Pump
Specialized liquid pump used in float zone crystal growth equipment for semiconductor materials like silicon, handling inert gases liquefied or process fluids with extreme purity requirements. It maintains zone stability during the melting process to produce high-purity monocrystalline ingots. Falls under HTS 8413.81.00 as other pumps for semiconductor wafer manufacturing preparation.
Semiconductor Wafer Grinding Coolant Pump
High-precision pump for circulating coolant fluids during crystal grinding of semiconductor boules to exact wafer diameters. Essential in wafer preparation equipment to maintain temperature control and surface flatness as per statistical note (b)(ii)(A). Classified in HTS 8413.81.00 as other pumps for semiconductor liquids.
Wafer Slicing Saw Coolant Circulation Pump
Pump designed for high-pressure coolant delivery in wafer slicing saws that cut monocrystalline semiconductor boules into thin wafers, as noted in statistical note (b)(ii)(B). Ensures clean cuts and prevents thermal damage during diamond saw operations. HTS 8413.81.00 covers these other specialized liquid pumps.
Semiconductor Wafer Lapping Fluid Pump
Precision metering pump for delivering lapping slurries and fluids in wafer preparation equipment to achieve critical flatness tolerances, per statistical note (b)(ii)(C). Used after slicing to prepare wafer surfaces for fabrication. Classifies under HTS 8413.81.00 as other liquid pumps for semiconductor processing.
Chemical Vapor Deposition Precursor Pump
Ultra-clean pump for liquid semiconductor precursors in CVD equipment used for wafer processing into devices. Handles volatile organic precursors with contamination-free delivery. HTS 8413.81.00 includes such other pumps for semiconductor manufacturing liquids.
Silicon Wafer Polishing Slurry Pump
Specialized pump circulating colloidal silica slurries for chemical-mechanical polishing (CMP) of semiconductor wafers to mirror finish required for fabrication. Critical for final surface preparation per statistical notes. Under HTS 8413.81.00 as other CMP liquid pumps.
Photoresist Developer Liquid Pump
Precision pump for alkaline developer solutions in semiconductor wafer photolithography processing. Delivers exact flow rates for pattern development after exposure. HTS 8413.81.00 for other liquid pumps in device fabrication.
Hydrofluoric Acid Etch Pump
Corrosion-resistant pump for HF etching solutions used to clean and pattern semiconductor wafers during device fabrication. Handles highly aggressive acids safely. Classified HTS 8413.81.00 as other pumps for semiconductor liquid processing.
Rinse Water Recirculation Pump for Wafer Cleaning
High-flow pump for deionized water recirculation in post-etch wafer cleaning stations, critical for particle removal before inspection. Supports semiconductor device yield. HTS 8413.81.00 other pumps for wafer processing liquids.
Epitaxial Reactor Precursor Delivery Pump
Metering pump for hydride and metalorganic precursors in MOCVD epitaxial reactors growing compound semiconductor layers on wafers. Ensures layer uniformity. Under HTS 8413.81.00 for semiconductor liquid pumps.
Spin Coating Photoresist Pump
Low-flow pump dispensing photoresist onto spinning semiconductor wafers for uniform thin film coating in lithography. Controls dispense profile for critical dimensions. HTS 8413.81.00 other precision liquid pumps.
Wet Stripper Chemistry Pump
Pump for hot piranha or SC-1 chemistries removing photoresist after etching in semiconductor wafer processing. High temperature and chemical resistance required. Classifies HTS 8413.81.00.
CMP Slurry Filtration Pump
Pump recirculating filtered CMP slurry to maintain abrasive particle distribution for uniform wafer polishing rates across production. Semiconductor-specific filtration. HTS 8413.81.00.
Wafer Dicing Coolant Pump
High-pressure pump for coolant in laser or mechanical wafer dicing saws separating finished semiconductor devices. Prevents chipping and thermal damage. HTS 8413.81.00 other pumps.