HFC-23 Semiconductor Etch Gas
Ultra-high purity trifluoromethane (HFC-23) used in plasma etching processes for semiconductor manufacturing, particularly for tungsten and oxide etch applications. Classified in HTS 2903.41.10.00 as a separate chemically defined fluorinated hydrocarbon meeting Chapter 29 heading requirements.
Import Duty Rates by Country of Origin
Alternative Classifications
This product could be classified differently depending on its characteristics or intended use.
If marketed primarily as non-organic gas for industrial processes
Gases not qualifying as organic compounds could shift to Chapter 28 inorganic chemicals.
If specialty gas mixtures for semiconductor processes
Mixtures with carrier gases or etchants classify as prepared chemical mixtures under 3824.
Not sure which classification is right?
The Tariff Assistant works through the GRI rules on your specific product to reach the right HTS code — and can price the duty on it in the same conversation.
Import Tips & Compliance
• Require SEMI-standard purity certificates (99.999%+) and confirm no moisture/particulates per semiconductor gas specs
• DOT UN1048 labeling required; ensure compatibility with stainless steel or aluminum cylinders
• Avoid industrial-use misclassification to 3824; pure HFC-23 remains Chapter 29 regardless of end-use
Related Products under HTS 2903.41.10.00
Trifluoromethane (HFC-23) Refrigerant Gas
Pure trifluoromethane, also known as HFC-23, is a saturated fluorinated derivative of acyclic hydrocarbons used primarily as a high-temperature refrigerant in industrial cooling systems. It falls under HTS 2903.41.10.00 due to its chemical structure as CHF3, matching the specific subheading for trifluoromethane. This colorless, non-flammable gas is supplied in high-pressure steel cylinders for specialized refrigeration applications.
HFC-23 Fire Suppressant Agent
Trifluoromethane (HFC-23) formulated as a clean fire extinguishing agent for total flooding systems in data centers and electronics manufacturing. Classified under HTS 2903.41.10.00 as it is a pure saturated fluorinated acyclic hydrocarbon (CHF3) per Chapter 29 definitions. This high-GWP gas leaves no residue and is effective against Class B fires.
Medical-Grade HFC-23 Calibration Gas
High-purity trifluoromethane (HFC-23) diluted in balance gas for calibrating medical gas analyzers and environmental monitoring equipment. Falls under HTS 2903.41.10.00 as a chemically defined organic compound per Chapter 29 note 1(a), with dilution allowed under note 1(d) if for safety/transport.
HFC-23 Process Byproduct Recovery Gas
Recovered and purified trifluoromethane (HFC-23) from HCFC-22 manufacturing processes, meeting commercial purity standards for refrigerant or feedstock reuse. HTS 2903.41.10.00 applies as it remains a chemically defined organic compound regardless of recovery source.