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Wafer Polisher Slurry Distributor Arm

> An articulating arm that delivers chemical slurry uniformly across the polishing pad in a semiconductor wafer polisher (CMP equipment). It is a non-electrical mechanical part that ensures consistent material removal rates, with no electrical connectors, insulators, coils, or contacts. This item is classified under tariff item 8487.90.00 as a machinery part not specified or included elsewhere in Chapter 84.

Import Duty Rates by Country of Origin

Origin CountryMFN TariffSurtaxesTotal Effective Rate
🇨🇳ChinaFree—Free
🇲🇽MexicoFree—Free
🇺🇸United StatesFree—Free
🇩🇪GermanyFree—Free
🇯🇵JapanFree—Free

More Specific Codes

This product may fall under a more specific subheading:

Alternative Classifications

This product could be classified differently depending on its characteristics or intended use.

8486.10.00Same rate: Free

If the arm is designed solely or principally for machines used in the manufacture of semiconductor wafers

Heading 84.86 covers machines and apparatus for the manufacture of semiconductor devices, including their parts, which may be more specific than 8487.

8481.80.00Same rate: Free

If the arm incorporates valves or similar flow-control devices

Heading 84.81 covers valves and similar apparatus for pipes, boiler shells, tanks, vats, or the like, which may take precedence if the arm has such features.

Not sure which classification is right?

The Tariff Assistant works through the GRI rules on your specific product to reach the right tariff item — and can price the duty on it in the same conversation.

Import Tips & Compliance

• > Confirm that the arm is purely mechanical—if it includes any valves, pumps, or electrical controls, it may be classified under a more specific heading

• Describe the arm's function in the CMP process and the specific polisher model it is designed for, as CBSA may request this information

• Check if the arm is eligible for duty-free entry under a tariff preference or a customs duty remission program

Related Products under Tariff item 8487.90.00

Automotive Crankshaft Oil Seal

A radial oil seal designed for sealing the crankshaft in internal combustion engines, preventing oil leakage between the rotating shaft and engine block. Made from nitrile rubber with a metal reinforced outer casing, this non-electrical machinery part is not specified or included elsewhere in Chapter 84, falling under tariff item 8487.90.00.

Axle Shaft Oil Seal

A heavy-duty oil seal for differential axle shafts in trucks, featuring a reinforced metal shell and a Viton lip designed for high-load applications. This seal retains lubricants and excludes contaminants without electrical components, qualifying for tariff item 8487.90.00 as a machinery part not elsewhere specified.

Boule Puller Seed Chuck

A precision chuck holding a seed crystal in Czochralski pullers for initiating monocrystalline growth, ensuring proper crystal orientation. This mechanical part of semiconductor crystal growing equipment contains no electrical features, qualifying for tariff item 8487.90.00 as a machinery part not specified elsewhere.

Camshaft Oil Seal

A precision oil seal for engine camshafts, featuring a low-torsion design with a metal insert and an HNBR compound to retain valvetrain lubrication. This seal is a non-electrical machinery part, classifiable under tariff item 8487.90.00 as a general machinery part not specified elsewhere.

CMP Polisher Retaining Ring

A consumable retaining ring used in chemical mechanical planarization (CMP) equipment to hold the polishing pad in place on the platen edge while allowing controlled pad wear during semiconductor wafer processing. Made from engineered plastic composite, this part has no electrical connectors, insulators, coils, contacts, or other electrical features, and is not specified or included elsewhere in Chapter 84.

CMP Polishing Head Retaining Ring

A consumable retaining ring for chemical mechanical polishing heads that contains slurry and wafer during planarization, engineered for uniform pressure distribution. This mechanical part of semiconductor wafer polishing machinery contains no electrical features, qualifying for tariff item 8487.90.00 as a machinery part not specified elsewhere.