CMP Slurry Filtration Pump
A pump that recirculates filtered chemical-mechanical polishing (CMP) slurry to maintain abrasive particle distribution for uniform wafer polishing. It is specifically designed for semiconductor wafer fabrication, ensuring consistent slurry delivery. This pump is critical for achieving the required surface finish on wafers.
Import Duty Rates by Country of Origin
| Origin Country | MFN Tariff | Surtaxes | Total Effective Rate |
|---|---|---|---|
| 🇨🇳China | Free | — | Free |
| 🇲🇽Mexico | Free | — | Free |
| 🇺🇸United States | Free | — | Free |
| 🇩🇪Germany | Free | — | Free |
| 🇯🇵Japan | Free | — | Free |
More Specific Codes
This product may fall under a more specific subheading:
Alternative Classifications
This product could be classified differently depending on its characteristics or intended use.
If the pump functions as a liquid elevator
Liquid elevators are classified separately from pumps.
If the pump is part of a machine for manufacturing semiconductor devices
Machines for semiconductor manufacturing are classified under heading 84.86.
Not sure which classification is right?
The Tariff Assistant works through the GRI rules on your specific product to reach the right tariff item — and can price the duty on it in the same conversation.
Import Tips & Compliance
• Document the pump's role in CMP slurry recirculation to justify classification under 8413.81.00
• Include technical data on flow rates and particle control
• Check if the pump is eligible for duty deferral under the Machinery Program if used in manufacturing
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