ASML YieldStar Optical Metrology Tool from Canada
Overlay and focus metrology system for semiconductor wafers using diffraction-based optical measurements to ensure lithographic pattern accuracy. Used post-exposure to monitor process control in high-volume manufacturing. HTS 9031.41.00 as wafer inspection equipment.
Duty Rate — Canada → United States
10%
Rate breakdown
9903.03.0110%Except for products described in headings 9903.03.02–9903.03.11, articles the product of any country, as provided for in subdivision (aa) of U.S. note 2 to this subchapter
Import Tips
• Technical drawings showing optical path and diffraction grating integration required for classification
• Separate valuation of pattern generator software if imported independently